Diaphragm
0.5 - 15 m³/h
> 1 mbar

Dry Scroll
3 m³/h
0.1 mbar

Dry Scroll
6 - 22 m³/h
0.007 mbar

Dry Scroll
35 - 46 m³/h
0.01 mbar

Dry Multistage Roots
30-120 m³/h
0.03 mbar

Dry Multistage Roots
100-200 m³/h
0.02 mbar

Dry Claw
80-390 m³/h
0.003 - 0.006 mbar

Rotary Vane
0.7 - 1.5 m³/h
<3x10^-3 mbar

Rotary Vane
3 - 12 m³/h
2x10^-3 mbar

Rotary Vane
18 - 28 m³/h
<1x10^-3 mbar

Rotary Vane
40 - 80 m³/h
<1x10^-3 mbar

Rotary Vane
175 - 275 m³/h
<7x10^-3 mbar

Rotary Vane
40 - 750 m³/h
0.08 mbar

Turbomolecular
47 -1250 l/s
<5x10^-10mbar

Turbomolecular
<4500 l/s
<1x10^-10 mbar

Turbomolecular
47-400 l/s
<5x10^-10mbar

Turbomolecular
240-930 l/s
<1x10^-10mbar

Turbomolecular
70 l/s
<5x10^-8 mbar

Ion Pump
0.2- 1200 l/s
1x10^-11 mbar

Ion Pump
>10000 m³/h
1x10^-12 mbar

Ion Pump
55 - 412 l/s H₂
27-156 l/s CO

Controller Ion Getter
Single / Multiple
TSP

Semiconductor
175 - 500 m³/h
<1x10^-6 mbar

Semiconductor
110 - 930 m³/h
0.001 mbar

Semiconductor
90 - 1000 m³/h
0.005 mbar

Semiconductor
100 - 1025 m³/h
0.005 mbar

Roots Booster
250 - 4200 m³/h
hydrokinetic

Roots Booster
6970 - 8360 m³/h
inverter

Vapour Booster
4000 - 12500 m³/h
100-300 mbar l/s

Diffusion
135 - 18000 l/s
24 mbar l/s