Non-Evaporable Getter

VACUUM PUMPS >HIGH VACUUM & UHV >UHV-XHV > NON - EVAPORABLE GETTER

NEGs are ideal for pump down, stay down applications and can be used to boost the performance of an ion pump or as a standalone pump. They are ideal for UHV applications due to their compact size and high H2 pumping speed

Compact Size

High pumping speeds in a compact volume

50-3500 l/s (H2)

Typical range base on the amount of material

Extended pumping periods

without the need for power

Standalone or in combination

to boost the performance of an ion pump

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NEG Pumps Technical Data

Pumping speed H2

Pumping speed CO

H2 sorption capacity

CO (25ºC) sorption capacity

CO Total sorption capacity

l/s

l/s

Torr l

Torr l

Torr l

N50

55

27

630

0.1

284

N100

106

51

1170

0.2

526

N200

208

94

2160

0.4

972

N300

312

125

2880

0.6

1296

N400

412

156

3600

0.8

1620

NEGs are reactive metals that have been pressed onto solid substrates or sintered into discs. The amount of material used controls the speed and capacity of the NEG pump, but typically ranges from 50 to 3,500 l/s of hydrogen. As NEGs become saturated with gases, they can be reactivated without venting to atmosphere. Their prime advantage is their ability to pump for extended periods without the need for power

NEGs are ideal for pump down, stay down applications and can be used to boost the performance of an ion pump or as a standalone pump. They are ideal for UHV applications due to their compact size and high H2 pumping speed. They are not suitable for applications that cycle up to atmospheric pressure regularly as this will saturate the surface and they can only be reactivated a finite number of times.

Product Features

LIQUID CRYOSHROUD

The liquid cryoshroud consists of a double walled, type 304L stainless steel cylinder with two liquid nitrogen feedthroughs (.375 in. diameter) with flare type fittings. It provides 1578 cm2 (245 in2 ) of liquid nitrogen cooled surface area that provides pumping speeds up to 12,000 ls-1 for hydrogen (see table). The shroud is mounted on an 8 in. CFF (DN160).

TSP FILAMENT CARTRIDGE

The filament cartridge is mounted on a 2- 3/4” CFF (DN40). The feedthrough supports three titanium-molybdenum filaments and a return path for ground isolation. Each filament contains 1.5 grams of usable titanium and averages 20 hours of operation.

AMBIENT SPUTTER SHIELD

The ambient sputter shield economically maximizes surface area when cooling is not practical or possible. It provides 827cm2 (128 in2 ) of ambient temperature surface area that provides pumping speeds up to 2200 ls-1 for hydrogen (see table). The shield is mounted on an 8 in. CFF (DN160) or a 6 in. CFF (DN100).

Media

Spectroscopy magazine