The BGV Mk2 pneumatic variant
Pneumatic Gate Valves
Edwards BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable.
They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10⁻⁸ mbar (1.2 x 10⁵ to 1x10⁻⁶ Pa). BGV gate valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed.
In order to connect the BGV Mk2 pneumatic valve to Edwards legacy products the BGV Mk2 TIM interface cable should be used. Lock Out Tag Out (LOTO) versions are also available.
Leak rate (body / Valve seat)
Pressure range
Max Operating temperature (valve body)
Cycles until first service
Available with
mbar l/s
°C
BGV Mk2
<1x10-9 / <1x10-7
1x10-8 mbar to 1.2 bar
150
5000
NW50, ISO63, ISO80, ISO100, ISO160
BGV LOTO
<1x10-9 / <1x10-7
1x10-9 mbar to 1.2 bar
120
20000
NW50, ISO63, ISO80, ISO100, ISO160
Spectroscopy magazine
Avoids re-start issues by keeping the pump running during maintenance
Minimises damage due to particulates in dusty processes.
Long service life and reliability in harsh environments.
