Titanium Sublimation Pumps (TSPs) are often used in combination with ion pumps or independently to remove reactive gases from the vacuum environment.
TSPs can operate from 10-5to 10-12 mbar and have pumping speeds in excess of 10,000 m3/h of hydrogen.
can be used independently or in combination with ion pumps to remove reactive gases from the vacuum environment
All TSP components are bakeable to 400°C
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Combined with an ion pump, the TSP allows for low ultimate pressures in a shorter amount of time. All TSP components are ba.
TSPs operate by heating a titanium filament and subliming (converting from solid to gas phase) titanium molecules onto a surface. Sublimed titanium molecules are then available to chemically react with reactive gases, like oxygen and nitrogen, and disassociate and diffuse hydrogen. TSPs can operate from 10-5 to 10-12 mbar and have pumping speeds in excess of 10,000 m3h-1 of hydrogen.
Product Features
LIQUID CRYOSHROUD
The liquid cryoshroud consists of a double walled, type 304L stainless steel cylinder with two liquid nitrogen feedthroughs (.375 in. diameter) with flare type fittings. It provides 1578 cm2 (245 in2 ) of liquid nitrogen cooled surface area that provides pumping speeds up to 12,000m3/h for hydrogen (see table). The shroud is mounted on an 8 in. CFF (DN160).
TSP FILAMENT CARTRIDGE
The filament cartridge is mounted on a 2- 3/4” CFF (DN40). The feedthrough supports three titanium-molybdenum filaments and a return path for ground isolation. Each filament contains 1.5 grams of usable titanium and averages 20 hours of operation.
AMBIENT SPUTTER SHIELD
The ambient sputter shie2 (128 in2 ) of ambient temperature surface area that provides pumping speeds up to 2200 m3/h for hydrogen (see table). The shield is mounted on an 8 in. CFF (DN160) or a 6 in. CFF (DN100).
