Valve VIVxxEKA
Isolation Valve
10⁻⁸ to 1000 mbar

Intended for use with nXDS, XDS, nXLi and nXRi dry primary pumps, the VIV vacuum isolation valve is a high conductance, fast acting high vacuum isolation valve that is designed to prevent the movement of vapour or particulates from the backing pump to the process chamber. When the VIV is closed, the backing pump is safely vented.
The VIV protects the process chamber from being vented when the pump stops or is stopped.
When the backing pump is restarted, the valve will slowly open when the pressure within the VIV has dropped, minimising the effects of any pressure burst.