iXL Dry Pump
Hermetically Sealed, innovative mechanism
Superior vacuum levels achieved
Integral controller and safety systems for flexible operation
Smooth, low noise and vibration operation
Oil lubricated precision bearings with no routine maintenance
Hermetically Sealed, innovative mechanism
Superior vacuum levels achieved
Integral controller and safety systems for flexible operation
Smooth, low noise and vibration operation
Oil lubricated precision bearings with no routine maintenance
iXL Sizes
iXL120N
iXL1000N
Peak Pumping Speedm³/h
110
930
Ultimate Pressure mbar
0.013
0.001
Power at Ultimate kW
0.55
1
Power in Green ModekW
0.05
0.045
Noise at Ultimate dB(A)
<55
<55
iXL Sizes
iXL120N
iXL1000N
Peak Pumping Speed
m³/h
110
930
Ultimate Pressure
mbar
0.013
0.001
Power at Ultimate
kW
0.55
1
Power in Green Mode
kW
0.045
0.05
Noise at Ultimate
dB(A)
<55
<55
iXL Sizes
iXL120N
iXL1000N
Peak Pumping Speed
m³/h
110
930
Ultimate Pressure
mbar
0.013
0.001
Power at Ultimate
kW
0.55
1
Power in Green Mode
kW
0.045
0.05
Noise at Ultimate
dB(A)
<55
<55
The iXL is available as the iXL120N stand-alone unit, or as the iXL1000N combination, which includes an inverter-driven booster delivering 930 m³/h peak pumping speed.
iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. It’s low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!
Product Features
UNIQUE PERFORMANCE
Class leading chamber pump down time reduces total average cycle time (TACT)
LOW POWER
Only 0.55kW* power consuption helps minimise customers cost of ownership
SMOOTH RUNNING
Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance
COMPACT
iXL120 is extremely small and light, saving valuable space
GREEN MODE
Green Mode can reduce power consumption by up to 92% during idle periods
ZERO PURGE OPTION
Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs
Product Features
LOW POWER
Only 0.55kW* power consuption helps minimise customers cost of ownership
UNIQUE PERFORMANCE
Class leading chamber pump down time reduces total average cycle time (TACT)
SMOOTH RUNNING
Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance
COMPACT
iXL120 is extremely small and light, saving valuable space
ZERO PURGE OPTION
Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs
GREEN MODE
Green Mode can reduce power consumption by up to 92% during idle periods
