The STP has a market leading reputation for quality and reliability. Available in four different ranges - Ultra High Vacuum; High Throughput; Ultra Low Vibration and Integrated Controller - it is considered by many as the Rolls Royce of turbomolecular pumps.
Wide range of sizes, inlet flanges and special versions
The STP is trusted and relied upon by industrial and labotary customers worldwide
Exceptional 5-axis full maglev pump performance, with zero hydrocarbon lubrication
Automatic balancing systems, corrosion resistance versions, power failure protection
between services can be achieved with these pumps. No routine or preventive maintenance is required
The integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools.
Inlet flange*
ISO
ICF
Pumping Speed
N2
H2
Ar
Compression ratio
N2
H2
Ultimate pressure
l/s
l/s
l/s
Pa
iX455
100K/160K
-
300/450
300/460
-
>108
>1x104
6.5x10-6
*VG flanges also available. ** extreme low vibration available
iXR1606
160F
203
1000
800/
-
>108
>1x104
6.5x10-6
iXR1606
200F/250F
253/305
1600
1200
-
>108
>1x103
10-7
iXR2206
200F
253
1850
1250
1650
>108
>1x103
10-7
iXR2206
250F
305
2200
1350
2000
>108
>1x103
10-7
iXA2206A
250F
305
2200
1700
1900
>108
1.0x104
10-7
iXA3306C
250F
305
2650
2050
2300
>108
2x103
10-7
iXA3306C
320F
356
3200
2300
2800
>108
2x103
10-7
iXA4506C
320F
-
4000
2700
3400
>108
1x103
10-7
The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beamlines on CD SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios.
Inlet flange
Pumping speed
N2
H2
Compression ratio
N2
He
H2
Ultimate Pressure with bake out heating
ISO flange
ICF flange
l/s
l/s
Pa
Pa
STP301
ISO100 / ICF152
300
300
>108
5x105
2x104
6.5x10-6
STP451
ISO160 / ICF203
480
460
>108
5x105
2x104
6.5x10-6
10-8
STP603
ISO160
650
550
>108
-
>105
6.5x10-6
-
STP1003
ISO200
1000
800
>108
-
>105
10-6
-
The multi-axis magnetic bearing system is used to suspend the rotor during operation, ensuring there is no risk of contamination while minimising vibration, noise and maintenance requirements.
The STP pumps can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. They offer class leading pumping performance demonstrating exceptional levels of reliability, and are widely accepted in the market with the installed base of over 140,000 units worldwide.They are the preferred choice for many of the most challenging semiconductor applications. For laboratory applications this makes STP maglev turbomolecular pumps extremely reliable.
Product Features
CORROSION RESISTANCE
most models of Edwards STP maglev turbomolecular pumps are also available in a special corrosion resistant version with nickel coated rotors and a nitrogen purge facility, making them ideal for chemical laboratory applications.
OIL FREE
ensures clean vacuum, low power and low vibration. the use of magnetic bearings eliminates all hydrocarbon lubricants.
VIBRATION FREE
magnetic levitation means no friction and thus extremely low vibration, in addition this remains constant and does not change as parts wear.
AUTOMATIC BALANCING SYSTEM
Edwards 5-axis pumps are able adjust the magnetic field dynamically to take out rotor imbalances.
MAINTENANCE FREE
zero friction means no wear and thus no routine maintenance is required in normal operation.
